发明名称 LINER TUBE AND CHARGED PARTICLE BEAM DEVICE HAVING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a liner tube having advantages such as no need to develop expensive devices and no concern to be crashed by an atmospheric pressure. SOLUTION: This liner tube 4 has a ceramic cylinder and a metallized layer and platimun plated layer 12 formed on the inner surface of the cylinder. Since the ceramic cylinder is an insulator and does not block a high-frequency alternating field, it does not interfere with effects of an electromagnetic lens or electromagnetic deflector disposed outside the liner tube. The metallized layer prevents electrification on the inner surface and can prevent harmful electric fields from generating. Existence of the platinum layer 12 hardly grows contaminations on the liner tube surface.
申请公布号 JP2001006594(A) 申请公布日期 2001.01.12
申请号 JP19990177797 申请日期 1999.06.24
申请人 NIKON CORP 发明人 NAKASUJI MAMORU
分类号 H01J37/141;H01J37/147;H01J37/16;(IPC1-7):H01J37/141 主分类号 H01J37/141
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