摘要 |
A fiber optic right angle transition is formed via anisotropic etching of single crystal silicon. The fiber optic right angle transition includes a substantially planar mirror surface (130), a first V-groove (110), and a second V-groove (120), each formed in a silicon substrate (100). The first V-groove (110), along a first longitudinal axis, and the second V-groove (120), along a second longitudinal axis, are at right angles to one another. The mirror surface (130) is substantially planar and intersects both the first longitudinal axis and the second longitudinal axis at an angle of 45 degrees. The first and second V-grooves (110, 120) are each adapted to receive an optical fiber (112, 122). The optical signal exits one optical fiber (112), is reflected by the mirror (130) and enters the other optical fiber (122), thereby effecting a right angle transition.
|