| 摘要 |
A method for forming a microelectromechanical (MEMS) resonator is disclosed. The method comprises first manufacturing a plurality of resonator structures. Each of the resonator structures differ from the others in a systematic manner, such as the length of the resonator structure. The resonance frequency of each of the resonator structures is determined. Then, a desired resonator structure is selected based upon the resonance frequency of the desired resonator structure.
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