发明名称 |
VEFAHREN ZUM HERSTELLEN EINES HALBLEITERARTIKELS UNTER VERWENDUNG EINES SUBSTRATES MIT EINER PORÖSEN HALBLEITERSCHICHT |
摘要 |
<p>A process for producing a semiconductor article is provided which comprises the steps of bonding a film onto a substrate having a porous semiconductor layer, and separating the film from the substrate at the porous semiconductor layer by applying a force to the film in a peeling direction. <IMAGE> <IMAGE> <IMAGE> <IMAGE></p> |
申请公布号 |
AT261612(T) |
申请公布日期 |
2004.03.15 |
申请号 |
AT19970310240T |
申请日期 |
1997.12.17 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SAKAGUCHI, KIYOFUMI;YONEHARA, TAKAO;NISHIDA, SHOJI;YAMAGATA, KENJI |
分类号 |
B28D5/00;G02F1/1362;H01L21/18;H01L21/20;H01L21/304;H01L21/66;H01L31/068;H01L31/18;(IPC1-7):H01L21/762 |
主分类号 |
B28D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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