SUBSTRATE INSPECTION APPARATUS FOR ENABLING APPEARANCE INSPECTION IN ONE APPARATUS

摘要

PURPOSE: A substrate inspection apparatus is provided to enable appearance inspection by using only one apparatus. CONSTITUTION: A work(71) on a work stage(42) is imaged by an area camera(26) in an appearance inspection part(2) and is processed through image processing, thereby determining quality of a connection part. The work(71) is transferred from the work stage(42) of the appearance inspection part(2) to a work stage(43) of an X-ray inspection part(3) by an alignment camera(39). An X-ray is irradiated from an X-ray source(37). An X-ray image is photographed by a camera(38). The photographed out is subjected to image processing, thereby determining the quality of a part unseen from the appearance of the connection part.