发明名称 Method for fabricating a fluid injection head structure
摘要 The present invention provides a fluid injection head structure and a method of fabricating the same. The fluid injection head structure is disposed on a substrate and has a bubble generator, a functional device for control the bubble generator, a first conductive trace composed of poly-silicon, a chamber, a manifold in flow communication with the chamber, and a second conductive trace. The second conductive trace electrically couples the functional device with the bubble generator and the first conductive trace. Moreover, the chamber further has at least one orifice through the substrate and a gate and the first conductive trace are formed in the same photo-etching process (PEP).
申请公布号 US6981323(B2) 申请公布日期 2006.01.03
申请号 US20040708152 申请日期 2004.02.11
申请人 BENQ CORPORATION 发明人 HUANG TSUNG-WEI;CHEN CHIH-CHING
分类号 B21D53/76;A61M5/168;A61M5/172;A61M5/30;B41J2/135;B41J2/14;B41J2/16;F02M61/16;F02M61/18 主分类号 B21D53/76
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