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发明名称
ETCHING APPARATUS
摘要
申请公布号
JPS51115247(A)
申请公布日期
1976.10.09
申请号
JP19750040626
申请日期
1975.04.03
申请人
NIPPON ELECTRIC CO
发明人
INADA GIICHI;SHIOSHIMA MASARU;SUGANO KATSUKI;KOBETSUSHIYO TAKESHI;SUZUKI MASATOSHI
分类号
C23F1/08;H01L21/302;H01L21/306
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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