Ultrasonic sensor for high temperature and manufacturing method thereof

摘要

Provided is an ultrasonic sensor which includes a piezoelectric vibrator made of a lithium niobate (LN) single crystal and may be used in a high temperature region by generating a high ultrasonic wave output, and prevents cracks from being generated in the crystal. A piezoelectric vibrator 1 of the present invention has a surface (Y-axis 36° cut surface) obtained by rotating a surface orthogonal to a Y-axis of the LN crystal about an X-axis by 36°±2° as an output surface. The ultrasonic sensor further includes a retarder 3 made of titanium and a bonding layer 2 for bonding one surface of the retarder 3 to the output surface. The bonding layer 2 is made of silver and frit glass, and the frit glass has a coefficient of linear expansion ranging from 5×10−6 K−1 to 15×10−6 K−1.

主权项

1. An ultrasonic sensor, comprising:
a piezoelectric vibrator which is made of lithium niobate and has a surface obtained by rotating a surface orthogonal to a Y-axis of a lithium niobate crystal about an X-axis by 36°±2° as an output surface; a retarder made of titanium; and a bonding layer for bonding one surface of the retarder to the output surface, wherein the bonding layer is made of silver and frit glass, and the frit glass has a coefficient of linear expansion ranging from 5×10−6 K−1 to 15×10−6 K−1.