发明名称 METHOD OF JUDGING MARK FOR SEMICONDUCTOR DEVICE
摘要 PURPOSE:To judge marks to be good or bad and to recognize letters and symbols easily, correctly and quickly by comparing a mark to be judged with each of the reference classfied marks to pass judgment based on the difference between them. CONSTITUTION:Images of letters B, G, V for classifying the colors of products are picked up and divided into roughly 20X28 picture elements. Among these letters, the one marked in the best condition is converted into a binary value and treated as a reference pattern. Subsequently, the image of a letter necessary to be classified is picked up and converted into a binary value. By making P(i,j), X(i,j) represent the above binary components, respectively, the correlative function (r) is computed. If the difference between the largest function and the one next to the largest is larger than a certain reference value, that correlative function will be regarded as the one representative of a letter of the largest type; moreover, the correlative function indicating a value greater than a preset reference one for judgment is estimated to represent a good product.
申请公布号 JPS5837931(A) 申请公布日期 1983.03.05
申请号 JP19810136767 申请日期 1981.08.31
申请人 TOKYO SHIBAURA DENKI KK 发明人 SANO TETSUYA
分类号 H01L21/66;H01L23/00 主分类号 H01L21/66
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