| 摘要 |
PURPOSE:To restrain the deterioration of the terminal for leading out the output power generated by electrolytic reaction due to photovoltage by a method wherein the positive polar side of said terminal is made of a conductive oxide, and the negative side being formed of a corrosion resistant metallic film. CONSTITUTION:A thermal resistant resin film 2 is formed on the surface of a stainless film 1. Thus, the lower electrodes 3a-3d are formed on a substrate 1 whereon the film 2 is formed. At this time, the terminal 4 for leading out the negative polar side power is simultaneously formed at a part on the film 2. Successively, an amorphous Si film 5 is formed on the film 2. Next, on the film 5 opposed to the electrodes 3a-3d, photo transmitting upper electrodes 6a-6d are adhesion-formed, respectively, over one ends on the electrodes 3b-3d adjacent to each other. At the same time therewith, the terminal 7 for leading out the positive polar side output power is formed at the other end of the film 2. Then, the titled device is completed by forming an SiO2 film 8 and a surface protection film 9 composed of photo transmitting organic resin on the electrodes 6a-6d. |
