| 摘要 |
PURPOSE:To reduce a measurement error caused by an indication error by the linearity of a displacement gauge, by providing a feeding mechanism for adjusting a distance in the thickness direction between the displacement gauge and an object to be measured. CONSTITUTION:With respect to two pieces of displacement gauges 11, 12 which have been fixed to a fixed arm 14, an object to be measured 13 are set onto a moving base 16 whose whole body can be moved in the longitudinal direction by the first feeding device 15, and a placing table 18 which can be moved in the vertical direction by the second feeding device 17 which has been installed on the moving base 16. A variation of an indicated value of the displacement gauge 11, which is generated by moving the object to be measured 13 in the longitudinal direction is always fed back to the device 17. As a result, a distance between the displacement gauge 11 and a measuring point of the object to be measured 13 can be kept roughly constant. In this way, a measurement error caused by an indication error by the linearity of the displacement gauge is reduced.
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