| 摘要 |
PURPOSE:To monitor the state of information processing on its midway by mounting a switch between a strain correction circuit and a high-speed information controller and connecting the switch to the strain correction circuit side. CONSTITUTION:When output information from a strain correction circuit 5 is monitored, a switch 6 is changed over to the side 2, stored temporarily to a buffer memory 23, conversion-processed 8, and picture-displayed 9 or printed 10. A defective pattern section on a sample and the corresponding section of the pattern of the picture display are compared, and there is faulty cause before the strain correction circuit when the same failure is generated. The generation of a defective after a high-speed information controller 7 can be estimated when there is no failure on display. When there is faulty cause in an information processing circuit before the correction circuit 5, the circuit 5 is not corrected or the circuit 5 is short-circuited and investigated, and the cause of a development circuit 4 or the strain correction circuit 5 can be discriminated. Since the order of picture display is the same as drawing, a drawing process up to the generation of the defective can be observed. Since information on its midway of the circuit can be investigated, the position of the generation of cause can be specified within a narrow range.
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