| 摘要 |
<p>A source (30) of clusters of atoms is provided, wherein the clusters are thermally conditioned after their formation so that the clusters are in the liquid state. A beam (14) of clusters is first formed during the mixing of a stream of atoms and a carrier gas. The beam of clusters mixed with carrier gas (48) is passed through a conditioner, preferably including a heated drift tube (50), to bring the clusters to a temperature whereat the clusters are in a condensed state without crystalline order, comparable to the liquid state. The conditioned cluster beam passes to vacuum (24), with separation and removal of a large portion of the carrier gas mixed therewith, so that cooling of the clusters in the cluster beam is minimized during their flight to the cluster target.</p> |
