| 摘要 |
PURPOSE:To prevent a trouble such as cracking when a heater is glowing, by unitarily molding a glow part and lead parts of conductive ceramics, and also to prevent cracking caused by thermal stress, by brazing the lead parts to a holder with a metallic pipe provided around the outer surfaces of insulating layers in the lead parts. CONSTITUTION:A ceramic heater 11 is constituted in such a manner that conductive sialon powder, for example, is kneaded with such as thermoplastic resin, and it is injection-molded into a metal mold having a specified cavity. The diameter of a glow part 20 is to be determined so that the thickness of a glow part 20 is thinner than those of lead parts 21 and 22. A metallic pipe 26 is made of the same stainless steel, for example, as of a holder 12, and it is fixed on the outer surfaces of lead parts 21 and 22. That is, high softening point glass containing much silicic acid, for example, is used as a material to form insulating layers 23 and 24, and the metallic pipe 26 is fixed on the layers by baking. Both the holder 12 and the metallic pipe 26 are fixed to each other by heating with a binder such as silver paste being interposed between both parts.
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