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发明名称
LARGE-SCALE INTEGRATED CIRCUIT
摘要
申请公布号
JPS647634(A)
申请公布日期
1989.01.11
申请号
JP19870163130
申请日期
1987.06.30
申请人
TOSHIBA CORP
发明人
OZAKI MAKOTO
分类号
G01R31/28;H01L21/66;H01L21/822;H01L27/04
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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