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发明名称
METHOD AND DEVICE FOR GROWING COMPOUND SEMICONDUCTOR CRYSTAL
摘要
申请公布号
JPH01203292(A)
申请公布日期
1989.08.16
申请号
JP19880029485
申请日期
1988.02.09
申请人
NEC CORP
发明人
FURUHATA NAOKI
分类号
C30B25/14;H01L21/205
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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