| 摘要 |
PURPOSE: To avoid oxidation of a wire bonder by cylindrical feeding a reductive gas round the wire spool and by mounting a torch at the lower of a wire feeding capillary along one of reductive gas discharge tubes disposed at both ends of the capillary. CONSTITUTION: On the inner top face of a cover 1 a diffuser 6 is disposed to inject an inert gas from a gas vessel 9 through a solenoid valve 11 periodically opened and closed by a timer 12 and a gas flow rate adjuster 10, thereby forming a reductive gas atmosphere round a spool 2 wound with the wire 20 to avoid oxidating the wire. Reductive gas discharge tubes 31, 32 are disposed at both ends of a wire feeding capillary 5 and a torch 30 is disposed at the lower end of the capillary 5 along the tube 32. This prevents a ball formed from the wire 20 by the discharge of the touch 30 from oxidation, thus avoiding the oxidation of the wire bonder. |
