METHOD AND DEVICE FOR CHECKING PATTERN

摘要

PURPOSE:To surely detect only the fatal defects even with a circuit pattern including many recessing/projecting pattern edges and with no influence received from these edges by expanding and contracting a detected binary pattern and comparing the connecting relation of the pattern with the normal connecting relation. CONSTITUTION:A mechanism control part 313 actuates an XYZtheta stage 314 and a pattern detector 301 detects an entire surface pattern of a check subject 300. The detected 2-dimensional pattern is binalized by a binalizing circuit 302 and sent to an expanding circuit 303 and a contracting circuit 304 respectively. The picture size is reduced by the picture size reducing circuits 305a and 305b and written into the memories 306 and 307. A connecting relation extracting device 308 reads the contents of both memories 306 and 307 and extracts the connecting relation of the pattern. A microcomputer 309 analyzes the picture data stored in both memories 306 and 307 and produces the defect deciding output 312 of the detect position to the circuit pattern including a defect.