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发明名称
MOLECULAR BEAM CRYSTAL GROWTH DEVICE
摘要
申请公布号
JPH02124795(A)
申请公布日期
1990.05.14
申请号
JP19880278444
申请日期
1988.11.01
申请人
SUMITOMO ELECTRIC IND LTD;NISSIN ELECTRIC CO LTD
发明人
TAKAGISHI SHIGENORI;KIMURA KOZO;INABA TETSUJI
分类号
C30B23/08;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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