ION SOURCE FOR HIGH MELTING POINT METAL,申请号JP19900217551-传众专利搜索

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发明名称	ION SOURCE FOR HIGH MELTING POINT METAL
摘要
申请公布号	JPH04101327(A)	申请公布日期	1992.04.02
申请号	JP19900217551	申请日期	1990.08.19
申请人	ULVAC JAPAN LTD	发明人	AGAWA YOSHIAKI;FUKUI RYOTA;TAKAKUWA TAKESHI
分类号	H01J27/22	主分类号	H01J27/22
代理机构		代理人
主权项
地址

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