Integrated multi-channel analog front end and digitizer for high speed imaging applications

摘要

A module for high speed image processing includes an image sensor for generating a plurality of analog outputs representing an image and a plurality of HDDs for concurrently processing the plurality of analog outputs. Each HDD is an integrated circuit configured to process in parallel a predetermined set of the analog outputs. Each channel of the HDD can include an AFE for conditioning a signal representing one sensor analog output, an ADC for converting a conditioned signal into a digital signal, and a data formatting block for calibrations and formatting the digital signal for transport to an off-chip device. The HDDs and drive electronics are combined with the image sensor into one package to optimize signal integrity and high dynamic range, and to achieve high data rates through use of synchronized HDD channels. Combining multiple modules results in a highly scalable imaging subsystem optimized for inspection and metrology applications.

主权项

1. A module for high speed image processing, the module comprising:
an image sensor for generating a plurality of analog outputs representing an image; a plurality of high density digitizers (HDDs) for concurrently processing the plurality of analog outputs; and a plurality of at least one of pixel gate driver circuits and timing and serial drive circuits in operative relation to the plurality of HDDs, each HDD being an integrated circuit, each HDD for processing in parallel a predetermined set of the plurality of analog outputs representing a portion of the image, and each channel of the HDD including:
an analog front end (AFE) for conditioning a differential signal representing one analog output and generating a conditioned signal, the AFE including a programmable gain amplifier (PGA) with switch-out capacitors; andan analog-to-digital converter (ADC) for converting the conditioned signal into a digital signal, the digital signal being provided for the high speed image processing.