| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method which enables the efficient manufacture of a functional precision component where a functional material is formed only in a recess of an uneven microstructure over a range of 10 nm-1 mm provided in a base body surface by using a chemical machining process basically using only water with no use of a polishing agent or abrasive grains, and a functional precision component manufactured by the manufacturing method.SOLUTION: A manufacturing method for a functional precision component where a functional material is formed only in a recess 3 of an uneven microstructure over a range of 10 nm-1 mm provided in a base body 1 surface comprises a stop layer forming step for forming a stop layer 4 with a predetermined thickness unprocessable by a machining process comprising Water-CARE over the whole surface of the base body by using a machining process, a functional material stacking step for forming a functional material 5 processable by the machining process by stacking on the stop layer, and a machining process for removing the functional material outside the recess by the machining process.SELECTED DRAWING: Figure 1 |
