| 摘要 |
PROBLEM TO BE SOLVED: To achieve a highly accurate angle output less in integration error in an integration circuit for angle detection in an inertia sensor including an angular velocity detection circuit having a structure synchronous with a resonance frequency of an angular velocity detection element.SOLUTION: An inertia sensor includes: an angular velocity detection element chip C1 that has a mechanical structure for detecting an angular velocity; and a signal processing LSI chip C2 that is an angular velocity detection circuit for detecting an angular velocity from the angular velocity detection element chip C1. The signal processing LSI chip C2 is configured to calculate an inclination angle by sampling a signal to be obtained from the angular velocity detection element chip C1 at discrete time synchronous with a drive frequency of the angular velocity detection element chip C1.SELECTED DRAWING: Figure 7 |
