| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique allowing for simplification of structure of a capacitance type actuator having a diagnostic function and allowing for miniaturization of the actuator .SOLUTION: The present specification discloses an actuator that comprises: a movable electrode; a drive diagnosing electrode arranged opposing the movable electrode; a reference potential signal line providing a reference potential; a drive potential signal line providing a drive potential; and a detection device detecting change in the potential of the drive diagnosing electrode. The movable electrode is electrically connected to the reference potential signal line. The drive diagnosing electrode is electrically connected to the reference potential signal line via a first switch and also electrically connected to the drive potential signal line via a second switch. In diagnostic actions, a detecting circuit detects change in the potential of the drive diagnosing electrode when the first switch is non-conductive and the second switch also is non-conductive.SELECTED DRAWING: Figure 2 |
