发明名称 硬化物の製造方法およびパターン形成方法
摘要 The present invention provides a photo-curable composition that requires a small mold-releasing force in a method of producing a cured product and also provides a method of producing a cured product with a small mold-releasing force. The method of producing a cured product includes applying a photo-curable composition onto a base material; pressing a mold to the photo-curable composition to form a pattern in the photo-curable composition; irradiating the photo-curable composition provided with the pattern with first light to generate a cured product having the pattern; and releasing the mold from the cured product, wherein a gas-generating region is formed from a gas-generating agent between the cured product and the mold; the gas-generating region is irradiated with second light to generate a gas in the gas-generating region; and the mold is released from the cured product after the generation of the gas or simultaneously with the generation of the gas.
申请公布号 JP5971938(B2) 申请公布日期 2016.08.17
申请号 JP20110277713 申请日期 2011.12.19
申请人 キヤノン株式会社 发明人 鈴木 達哉;伊藤 俊樹;三原 知恵子
分类号 H01L21/027;C08F2/00;C08F2/46 主分类号 H01L21/027
代理机构 代理人
主权项
地址
您可能感兴趣的专利