发明名称 半導体装置製造用仮接合用積層体、および、半導体装置の製造方法
摘要 Provided is temporary bonding laminates for used in a manufacture of semiconductor devices, by which a member to be processed can be temporarily supported securely and readily during a mechanical or chemical process of the member to be processed and then the processed member can be readily released from the temporary support without damaging the processed member even after a high temperature process, and processes for manufacturing semiconductor devices. The temporary bonding laminate includes comprising (A) a release layer and (B) an adhesive layer wherein the release layer (A) comprises (a1) a resin 1 having a softening point of 200° C. or more and (a2) a resin 2; the resin 2 after curing has capable of being dissolved at 5% by mass or more, at 25° C., in at least one of solvents selected from hexane and the like.
申请公布号 JP6050170(B2) 申请公布日期 2016.12.21
申请号 JP20130066656 申请日期 2013.03.27
申请人 富士フイルム株式会社 发明人 小山 一郎;岩井 悠
分类号 H01L21/02;C09J4/02;C09J11/06;C09J201/00;H01L21/304 主分类号 H01L21/02
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