| 摘要 |
PROBLEM TO BE SOLVED: To surely eliminate foreign substances from a first probe of a probe unit.SOLUTION: A board inspection device comprises: a first movement mechanism 11 that moves a probe unit 31 in a first direction where the probe unit 31 is set close to or away from a lower surface 100a of a board 100; a second movement mechanism 12 that moves a second probe 42 in a second direction parallel to an upper surface 100b of the board 100 and in a third direction where the second probe 42 is set close to or away from the upper surface 100b; a control unit 18 that controls the first movement mechanism 11 and the second movement mechanism 12; an inspection unit 14 that inspects the board 100 on the basis of the electric signals input/output through the first probe 41 and the second probe 42 of the probe unit 31; a discharge needle 13 that is moved by the second movement mechanism 12; and a power source unit 61 that generates the discharge power source. The control unit 18 controls the second movement mechanism 12 to remove foreign substances from a foreign substance removal target probe among the first probes 41 by generating the discharging in the state that the discharge needle 13 is put close to the foreign substance removal target probe.SELECTED DRAWING: Figure 1 |
