发明名称 ワイヤボンディング構造の製造方法
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a wire bonding structure which allows for avoiding laser irradiation to places that should not be irradiated with a laser while reducing the useless energy of laser, and for bonding a wire and an object to be bonded more firmly.SOLUTION: The manufacturing method of a wire bonding structure includes a step for preparing a bonding wedge 1 having a light incidence surface 112 and a light exit surface 131 spaced apart from each other, and a step for bonding a wire 6' and a first object to be bonded 71 by irradiating the wire 6' with a laser 881 via the light exit surface 131, while holding the wire 6' by means of the light exit surface 131 and the first object to be bonded 71.
申请公布号 JP6050928(B2) 申请公布日期 2016.12.21
申请号 JP20110102846 申请日期 2011.05.02
申请人 ローム株式会社 发明人 富士 和則
分类号 H01L21/607 主分类号 H01L21/607
代理机构 代理人
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