发明名称 ELECTRONIC MEMBER PEELING METHOD AND LAMINATED BODY
摘要 Provided is a method of peeling an electronic member (16) from a laminate (10) composed of the electronic member (16) adhered to a supporting substrate (12) via an adhesive film (14), the adhesive film (14) having a self-peeling adhesive layer (17) on a surface located on the side of the supporting substrate (12) and an exposed region A in at least one part of a surface (14a) which is located on the side of the electronic member (16). The method includes: a step of reducing adhesive strength between the supporting substrate (12) and the self-peeling adhesive layer (17) in the region A by applying energy on the region A; a step of removing the supporting substrate (a) from the laminate by further applying energy on the region and thus further reducing the adhesive strength reduced in the prior step between the supporting substrate (a) and the self-peeling adhesive layer from a starting point of the interface between the supporting substrate (a) and the self-peeling adhesive layer; and a step of peeling the electronic member (16) from the laminate by removing the adhesive film (14) from the electronic member (16).
申请公布号 EP3007211(A4) 申请公布日期 2016.12.14
申请号 EP20140803829 申请日期 2014.05.22
申请人 Mitsui Chemicals Tohcello, Inc. 发明人 USUGI Shinichi;IGARASHI Kouji;MORIMOTO Akimitsu
分类号 H01L21/304;C09J5/00;H01L21/683 主分类号 H01L21/304
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