发明名称 半導体装置
摘要 A semiconductor memory device including a bit line, a word line, a transistor, and a capacitor is provided. The transistor includes source and drain electrodes; an oxide semiconductor film in contact with at least both top surfaces of the source and drain electrodes; a gate insulating film in contact with at least a top surface of the oxide semiconductor film; a gate electrode which overlaps with the oxide semiconductor film with the gate insulating film provided therebetween; and an insulating film covering the source and drain electrodes, the gate insulating film, and the gate electrode. The transistor is provided in a mesh of a netlike conductive film when seen from the above. Here, the drain electrode and the netlike conductive film serve as one and the other of a pair of capacitor electrodes of the capacitor. A dielectric film of the capacitor includes at least the insulating film.
申请公布号 JP6045176(B2) 申请公布日期 2016.12.14
申请号 JP20120090012 申请日期 2012.04.11
申请人 株式会社半導体エネルギー研究所 发明人 齋藤 利彦
分类号 H01L21/8242;H01L21/336;H01L27/108;H01L29/786 主分类号 H01L21/8242
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