发明名称 Optical arrangement for deflecting a light beam
摘要 An optical arrangement for deflecting a light beam includes first and second deflection devices, and a coupling mirror. The first deflection device is rotatable about a first axis using a first rotary drive, and includes two mirrors disposed non-rotatably with respect to each other in an angular position so as to rotate jointly about the first axis. The second deflection device is rotatable about a second axis using a second rotary drive, and includes a third mirror. The coupling mirror deflects the light beam onto the first or second mirror at an angle greater than 45° relative to the surface of the mirror. The first and second axes are perpendicular to each other. The first and a second mirrors rotate jointly about the first axis so that the light beam rotates about a center of rotation located on the second axis.
申请公布号 US7345800(B2) 申请公布日期 2008.03.18
申请号 US20060347450 申请日期 2006.02.03
申请人 LEICA MICROSYSTEMS CMS GMBH 发明人 WIDZGOWSKI BERND
分类号 G02B26/08 主分类号 G02B26/08
代理机构 代理人
主权项
地址
您可能感兴趣的专利