| 发明名称 |
Analysis Method and X-Ray Photoelectron Spectroscope |
| 摘要 |
An analysis method includes: acquiring a photoelectron spectrum and an X-ray-excited Auger spectrum, the photoelectron spectrum being obtained by detecting photoelectrons emitted from a specimen by irradiating the specimen with X-rays, and the X-ray-excited Auger spectrum being obtained by detecting Auger electrons emitted from the specimen by irradiating the specimen with X-rays; calculating a quantitative value of each element included in the specimen based on the photoelectron spectrum; and performing a curve fitting process on the X-ray-excited Auger spectrum by using an electron beam-excited Auger electron standard spectrum, and calculating a quantitative value of an analysis target element in each chemical bonding state included in the specimen. |
| 申请公布号 |
US2017067837(A1) |
申请公布日期 |
2017.03.09 |
| 申请号 |
US201615258374 |
申请日期 |
2016.09.07 |
| 申请人 |
JEOL Ltd. |
发明人 |
Shima Masahide |
| 分类号 |
G01N23/223;G01N23/225 |
主分类号 |
G01N23/223 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An analysis method comprising:
acquiring a photoelectron spectrum and an X-ray-excited Auger spectrum, the photoelectron spectrum being obtained by detecting photoelectrons emitted from a specimen by irradiating the specimen with X-rays, and the X-ray-excited Auger spectrum being obtained by detecting Auger electrons emitted from the specimen by irradiating the specimen with X-rays; calculating a quantitative value of each element included in the specimen based on the photoelectron spectrum; and performing a curve fitting process on the X-ray-excited Auger spectrum by using an electron beam-excited Auger electron standard spectrum, and calculating a quantitative value of an analysis target element in each chemical bonding state included in the specimen. |
| 地址 |
Tokyo JP |
