| 发明名称 |
PIEZOELECTRIC DEVICE |
| 摘要 |
A piezoelectric device that includes a substrate defining an opening therein; a piezoelectric layer arranged above the substrate such that at least part of the piezoelectric layer extends over the opening and forms a membrane part that is not superimposed with the substrate; a lower electrode arranged below the piezoelectric layer in at least the membrane part; and an upper electrode that is arranged above the piezoelectric layer so as to face at least part of the lower electrode with the piezoelectric layer interposed therebetween in the membrane part. A heater is arranged above the piezoelectric layer so as to be separate from the upper electrode or at least part of the upper electrode doubles as a heater. |
| 申请公布号 |
US2017069821(A1) |
申请公布日期 |
2017.03.09 |
| 申请号 |
US201615355369 |
申请日期 |
2016.11.18 |
| 申请人 |
Murata Manufacturing Co., Ltd. |
发明人 |
MOURI TAKAO;Yamamoto Kansho |
| 分类号 |
H01L41/047;H01L41/18;H01L41/113;H01L41/09 |
主分类号 |
H01L41/047 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A piezoelectric device comprising:
a substrate defining an opening therein; a piezoelectric layer arranged above the substrate such that at least part of the piezoelectric layer extends over the opening and forms a membrane part that is not superimposed with the substrate; a first electrode that is arranged between the piezoelectric layer and the substrate in at least the membrane part; an second electrode that is arranged above the piezoelectric layer so as to face at least part of the first electrode with the piezoelectric layer interposed therebetween in the membrane part; and a heater arranged above the piezoelectric layer and separate from the upper electrode. |
| 地址 |
Nagaokakyo-shi JP |
