| 摘要 |
PURPOSE: To provide a manufacturing equipment for a thin film solar cell having a CuInSe2 alloy film in which the Se content is reduced to lower the cell cost. CONSTITUTION: A base 1 has an exhaust tube 3 and a gas introducing tube 4. A bell-jar 2 is put on the base 1 via an O-ring 7. A thin film solar cell 55 and Se powder are put in the recessed part of a lower heating jig 11, which is arranged on the base 1. An upper heating jig 21 is put on the lower heating jig 11 to cover it, which are surrounded by heat shielding plates 19, 29. The upper heating jig 21 is moved up and down by a vertical movement mechanism constituted of a retainer 32, a supporting plate 33, a screw shaft 34, struts 40a, 40b, supporting plates 41, 42, pulleys 36, 43, a belt 44, a rotary shaft 45, bevel gears 46, 47, a rotary shaft 48, and a handle 49. The upper and the lower heating jigs are heated with a heater, and Se is made to react with the thin film solar cell to form a CuInSe2 alloy film. |
