METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE

摘要

A lower electrode and an adhesive layer made of an insulator are formed on a back surface on the ion implantation layer side of a piezoelectric single crystal substrate. A supporting substrate in which sacrificial layers made of a conductive material have been formed is bonded to the surface of the adhesive layer. By heating the composite body including the piezoelectric single crystal substrate, the lower electrode, the adhesive layer, and the supporting substrate, a layer of the piezoelectric single crystal substrate is detached to form a piezoelectric thin film. A liquid polarizing upper electrode is formed on a detaching interface of the piezoelectric thin film. A pulsed electric field is applied using the polarizing upper electrode and the sacrificial layers as counter electrodes. Consequently, the piezoelectric thin film is polarized.

主权项

1. A method for manufacturing a piezoelectric device comprising:
an ion implantation step of forming an ion implantation layer by implanting ions into a piezoelectric substrate; a supporting substrate disposing step of disposing a supporting substrate in which a conductive sacrificial layer has been formed, the supporting substrate being disposed on an ion implantation layer side of the piezoelectric substrate; a heated detachment step of detaching a layer of the piezoelectric substrate in which the ion implantation layer has been formed to form a piezoelectric thin film by heating the piezoelectric substrate; and a polarization step of polarizing the piezoelectric thin film by applying an electric field to the detached piezoelectric thin film; wherein in the polarization step, the sacrificial layer is used as an electrode to which the electric field is applied.