ALKOXIDE COMPOUND, RAW MATERIAL FOR FORMING THIN FILM, METHOD FOR MANUFACTURING THIN FILM, AND ALCOHOL COMPOUND

摘要

An alkoxide compound is represented by General Formula (I) below:;;wherein R1 to R3 each independently represent hydrogen, a C1-12 hydrocarbon group, etc.; R4 represents a C1-12 hydrocarbon group, etc.; L represents hydrogen, halogen, a hydroxyl group, an amino group, an azi group, a phosphido group, a nitrile group, a carbonyl group, a C1-12 hydrocarbon group, etc.; and M represents a metal atom or a silicon atom, n represents an integer of 1 or more, m represents an integer of 0 or more, and n+m represents the valence of the metal atom or silicon atom.

主权项

1. An alkoxide compound represented by General Formula (I) below: wherein R1 to R3 each independently represent hydrogen, a C1-12 hydrocarbon group, or a group represented by General Formulas (X-1) to (X-8) below; R4 represents a C1-12 hydrocarbon group or a group represented by General Formulas (X-1) to (X-8) below; provided that when R1 is a methyl group, R2 is a methyl group or an ethyl group and R4 is a methyl group, R3 represents hydrogen, a C4-12 hydrocarbon group or a group represented by General Formulas (X-1) to (X-8) below; L represents hydrogen, halogen, a hydroxyl group, an amino group, an azi group, a phosphido group, a nitrile group, a carbonyl group, a C1-12 hydrocarbon group or a group represented by General Formulas (L-1) to (L-13) below; and M represents a metal atom or a silicon atom, n represents an integer of 1 or more, m represents an integer of 0 or more, and n+m represents a valence of the metal atom or silicon atom,wherein RX1 to RX12 each independently represent hydrogen or a C1-12 hydrocarbon group, and A1 to A3 each represent a C1-6 alkanediyl group,wherein RL1 to RL31 each independently represent hydrogen or a C1-12 hydrocarbon group, and A4 to A7 each represent a C1-6 alkanediyl group; provided that when RL1 to RL31 are each a C1-12 hydrocarbon group, a hydrogen atom in the hydrocarbon group may be substituted with a halogen atom or an amino group.