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发明名称
摘要
申请公布号
JPS5473547(U)
申请公布日期
1979.05.25
申请号
JP19770148498U
申请日期
1977.11.04
申请人
发明人
分类号
H05B6/10;H01L21/00;H01L21/673;(IPC1-7):H05B5/08
主分类号
H05B6/10
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代理人
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