Process roller for receiving and guiding substrates in strip form in vacuum coating installations

摘要

A process roller for receiving and guiding substrates in strip form in vacuum coating installations. The process roller comprises a heater located inside the process roller, in the form of an elongated radiant heater, and also a cylindrical lateral surface for receiving a substrate in strip form, the process roller being mounted rotatably about an axis of rotation in a vacuum process chamber. A particularly uniform temperature distribution can be achieved on the process roller's lateral surface by the process roller (2) being configured in a vacuum-tight manner, by the lateral surface (3) of the process roller (2) being connected in a vacuum-tight manner to two end caps (4, 5), which have a flattened, outwardly curved hemispherical form, by the interior space of the process roller (2) being connected to a vacuum connection (6), and by the radiant heater (8) extending into the region of the end caps (4, 5).

主权项

1. A process roller for receiving and guiding substrates in strip form in vacuum coating installations comprising an interior space (18), a radiant heater (8) that is elongated and completely enclosed within the interior space of the process roller, and also a cylindrical lateral surface for receiving a substrate in strip form, the process roller being mounted rotatably about an axis of rotation (12) in a vacuum process chamber, wherein the process roller (2) is configured in a vacuum-tight manner, in that the cylindrical lateral surface (3) of the process roller (2) is connected in a vacuum-tight manner to two end caps (4, 5), which have a curved form that is outwardly curved along the axis of rotation (12) and define interior volumes (17), the interior space of the process roller is defined by the interior volumes of the end caps and an interior volume of the cylindrical lateral surface, a supporting tube (11) is arranged coaxially with the axis of rotation (12) of the process roller (2) and is connected to one of the end caps (4, 5), the interior space of the process roller (2) is hermetically sealed and connected to a vacuum connection (6) through the supporting tube (11) to generate a vacuum in the interior space, a rod-shaped holding device (14) extends through the supporting tube (11) and into the process roller (2), and the radiant heater (8) is fastened to the rod-shaped holding device (14) and extends into and between the interior volumes (17) of the end caps (4, 5).