发明名称 |
STANDING WAVE INTERFEROMETRIC MICROSCOPE |
摘要 |
A wide-field interferometric microscope comprising:
A specimen holder, for holding a specimen at an analysis location;An illuminator, for illuminating the specimen with input radiation, so as to cause it to emit fluorescence light;A pair of projection systems, arranged at opposite sides of said analysis location, to collect at least a portion of said fluorescence light and direct a corresponding pair of light beams into a respective pair of inputs of an optical combining element, where they optically interfere;A detector arrangement, for examining output light from said combining element,
wherein:
The illuminator is configured to produce a standing wave of input radiation at the analysis locationThe detector arrangement comprises exactly two interferometric detection branches. |
申请公布号 |
US2017115224(A1) |
申请公布日期 |
2017.04.27 |
申请号 |
US201615246512 |
申请日期 |
2016.08.24 |
申请人 |
FEI Company |
发明人 |
Daum Rainer;Voegele Xaver |
分类号 |
G01N21/64;G02B21/06;G01N21/45;G02B21/08;G02B21/36;G02B21/16;G02B21/18 |
主分类号 |
G01N21/64 |
代理机构 |
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代理人 |
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主权项 |
1. A wide-field interferometric microscope comprising:
a specimen holder, for holding a specimen at an analysis location; an illuminator, for illuminating the specimen with input radiation, so as to cause it to emit fluorescence light; a pair of projection systems, arranged at opposite sides of said analysis location, to collect at least a portion of said fluorescence light and direct a corresponding pair of light beams into a respective pair of inputs of an optical combining element, where they optically interfere; and a detector arrangement, for examining output light from said combining element, wherein: the illuminator comprises an optical cavity that is configured to produce a standing wave of input radiation at the analysis location; and the detector arrangement comprises exactly two interferometric detection branches. |
地址 |
Hillsboro OR US |