| 发明名称 | Workpiece cutting method | ||
| 摘要 | A workpiece cutting method is provided. The workpiece cutting method includes an attaching step of attaching an adhesive tape to the front side or back side of a workpiece, an applying step of applying a liquid resin to the front side or back side of a support member, a pressing step of superimposing the workpiece on the support member in the condition where the liquid resin and the adhesive tape come into contact with each other, and then pressing the workpiece or the support member, a fixing step of curing the liquid resin to thereby fix the workpiece to the support member, and a cutting step of cutting the workpiece fixed to the support member by using a cutting blade. | ||
| 申请公布号 | US9633887(B2) | 申请公布日期 | 2017.04.25 |
| 申请号 | US201615098902 | 申请日期 | 2016.04.14 |
| 申请人 | DISCO CORPORATION | 发明人 | Fukazawa Takashi;Onodera Hiroshi |
| 分类号 | H01L21/67;H01L21/78;H01L21/683 | 主分类号 | H01L21/67 |
| 代理机构 | Greer Burns & Crain, Ltd. | 代理人 | Greer Burns & Crain, Ltd. |
| 主权项 | 1. A workpiece cutting method comprising: an attaching step of attaching an adhesive tape to a back side of a workpiece, wherein the workpiece includes a plurality of devices on a front side thereof, and further wherein the front side of the workpiece faces in a direction opposite to the direction that the back side faces; an applying step of applying a liquid resin to the front side or back side of a support member; a pressing step of superimposing said workpiece on said support member in the condition where said liquid resin and said adhesive tape come into contact with each other, and then pressing said workpiece or said support member; a fixing step of curing said liquid resin to thereby fix said workpiece to said support member; and a cutting step of cutting said workpiece fixed to said support member by using a cutting blade. | ||
| 地址 | Tokyo JP | ||