| 发明名称 |
INSPECTION SYSTEM AND INSPECTION METHOD |
| 摘要 |
An inspection system of an embodiment includes: a planar illumination unit that temporally and spatially varies intensities of light in a periodic manner; a time-correlation image generator that generates a time-correlation image with a time-correlation camera or an image capturing system that performs an operation equivalent to that of the time-correlation camera; and a calculation processor that calculates a characteristic from the time-correlation image, the characteristic corresponding to a distribution of normal vectors to an inspection target surface and serving to detect an abnormality based on at least either a difference from a surrounding area or a difference from a reference surface. |
| 申请公布号 |
US2017108443(A1) |
申请公布日期 |
2017.04.20 |
| 申请号 |
US201515300549 |
申请日期 |
2015.03.31 |
| 申请人 |
The University of Tokyo ;KOCHI PREFECTURAL PUBLIC UNIVERSITY CORPORATION |
发明人 |
KURIHARA Toru;ANDO Shigeru |
| 分类号 |
G01N21/88;G06K9/46 |
主分类号 |
G01N21/88 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An inspection system comprising:
a planar illumination unit that temporally and spatially varies intensities of light in a periodic manner; a time-correlation image generator that generates a time-correlation image with a time-correlation camera or an image capturing system that performs an operation equivalent to that of the time-correlation camera; and a calculation processor that calculates a characteristic from the time-correlation image, the characteristic corresponding to a distribution of normal vectors to an inspection target surface and serving to detect an abnormality based on at least either a difference from a surrounding area or a difference from a reference surface. |
| 地址 |
Tokyo JP |
