发明名称 Integrated Circuit With Conductive Line Having Line-Ends
摘要 A semiconductor device is disclosed, including a plurality of conductive features disposed over a substrate. A dielectric layer separates the conductive features. A conductive line is provided, connecting a subset of the conductive features. The conductive line includes a line-like portion and a line-end portion.
申请公布号 US2017098574(A1) 申请公布日期 2017.04.06
申请号 US201615384076 申请日期 2016.12.19
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Ting Chih-Yuan;Shieh Jyu-Horng;Huang Pei-Wen
分类号 H01L21/768;H01L23/528;H01L21/8238;H01L21/033;H01L21/8234 主分类号 H01L21/768
代理机构 代理人
主权项 1. A semiconductor device comprising: a plurality of conductive features over a substrate; a dielectric layer separating the conductive features; and a conductive line connecting a subset of the conductive features, the conductive line including: a line-like portion having a first length and a first width; anda line-end portion connecting to an end of the line-like portion, wherein the line-end portion has a second width, equal to or larger than the first width; wherein the line-end portion has a second length, smaller than the first length.
地址 Hsin-Chu TW