发明名称 |
Integrated Circuit With Conductive Line Having Line-Ends |
摘要 |
A semiconductor device is disclosed, including a plurality of conductive features disposed over a substrate. A dielectric layer separates the conductive features. A conductive line is provided, connecting a subset of the conductive features. The conductive line includes a line-like portion and a line-end portion. |
申请公布号 |
US2017098574(A1) |
申请公布日期 |
2017.04.06 |
申请号 |
US201615384076 |
申请日期 |
2016.12.19 |
申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Ting Chih-Yuan;Shieh Jyu-Horng;Huang Pei-Wen |
分类号 |
H01L21/768;H01L23/528;H01L21/8238;H01L21/033;H01L21/8234 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
1. A semiconductor device comprising:
a plurality of conductive features over a substrate; a dielectric layer separating the conductive features; and a conductive line connecting a subset of the conductive features, the conductive line including:
a line-like portion having a first length and a first width; anda line-end portion connecting to an end of the line-like portion, wherein the line-end portion has a second width, equal to or larger than the first width; wherein the line-end portion has a second length, smaller than the first length. |
地址 |
Hsin-Chu TW |