Method and apparatus for depositing copper-indium-gallium selenide (CuInGaSe2-cigs) thin films and other materials on a substrate

摘要

An apparatus for deposition of a plurality of elements onto a solar cell substrate that comprises: a housing; a transporting apparatus to transport the substrate in and out of the housing; a first tubing apparatus to deliver powders of a first elements to the housing; a first source material tube located outside of the housing and joined to a feeder tube of the tubing apparatus; a valve located inside of the first source material tube sufficient to block access between the first source material tube and the first feeder tube; a first heating tube located inside of the housing and connected to the first feeder tube; a similar second tubing apparatus to deliver powders of a second elements to the housing; a loading station for loading the substrate onto the transporting apparatus; one or more thermal sources to heat the housing and the first and second heating tube.

主权项

1. A method for deposition of one or more elements and compounds onto a solar cell substrate comprising:
a. providing a substrate; b. providing one or more elements and compounds for deposition to said substrate; c. providing a housing; d. providing a transporting apparatus to transport said substrate in and out of said housing; e. placing said substrate onto said transporting apparatus and having said transporting apparatus transport said substrate into said housing; f. providing one or more tubing apparatus to deliver powders of said one or more elements and compounds to said housing wherein said tubing apparatus is comprised of one or more feeder tubes located outside of said housing and joined to said housing; a plurality of source material tubes located outside of said housing and joined to said feeder tubes; a plurality of valves located inside of said source material tubes sufficient to block access between said source material tubes and said feeder tubes; one or more heating tubes located inside of said housing and connected to said feeder tubes; g. placing said one or more elements and compounds into said source material tubes; h. opening said valves to allow said one or more elements and compounds to move into said feeder tubes; i. providing a portion of carrier gas and feeding said carrier gas into said feeder tubes; j. allowing said carrier gas to carry said one or more elements and compounds from said feeder tubes to said heating tubes; k. providing one or more thermal sources to heat said housing and said heating tubes and heating said housing and said heating tubes; l. vaporizing said one or more elements and compounds inside said heating tubes into a vapor and allowing said vapor to leave said heating tubes; wherein said heating tubes comprise upper and lower portions; wherein said lower portions face said substrate and said upper portions are opposite to said lower portions; wherein only said lower portions are permeable to said vapor and said carrier gas; m. allowing said one or more elements and compounds to deposit onto said substrate after said one or more elements and compounds leave said heating tubes; n. transporting said substrate outside of said housing after said one or more elements and compounds are deposited onto said substrate.