SAMPLE POSITIONING METHOD AND CHARGED PARTICLE BEAM APPARATUS

摘要

The present invention provides a sample positioning method that can easily and quickly position a target observation area of a sample into a field of view of a first charged particle beam. The method includes: displaying an image including the sample in a display screen; designating an attention point on the basis of the image in the display screen; aligning the position of the sample stage in the direction of an optical axis so that the attention point is positioned in an on-axis point tracer plane perpendicular to the optical axis through an on-axis target point on the optical axis; and moving the attention point to the on-axis target point by performing detection of deviation of the attention point from the on-axis target point and movement in the on-axis point tracer plane; and moving the attention point into a depth of a focus of an charged particle beam optics.

主权项

1. A sample positioning method of positioning a target observation area of a sample, which is disposed on a sample stage in a sample chamber of a charged particle beam apparatus, into a field of view of a first charged particle beam radiated from a charged particle beam optical optics installed in a first charged particle beam column, the method including:
displaying an image of inside of the sample chamber including the sample on the sample stage therein in a display screen of a display unit; designating an attention point on the target observation area on the basis of the image on the display screen; aligning the sample stage in a direction of a first optical axis so that the attention point is positioned on an on-axis point tracer plane perpendicular to the first optical axis through an on-axis target point on the first optical axis of the first charged particle beam column; after positioning the attention point on the on-axis point tracer plane, performing detection of deviation of the attention point from the on-axis target point on the display screen and movement of the sample stage within the on-axis point tracer plane only in a direction perpendicular to the first optical axis, and moving the attention point to the on-axis target point; and after moving the attention point to the on-axis target point, moving the attention point within depth of focus of the charged particle beam optical optics by moving the sample stage along the first optical axis.