LIQUID EJECTION APPARATUS AND METHOD FOR MANUFACTURING LIQUID EJECTION APPARATUS

摘要

A liquid ejection apparatus is disclosed. One apparatus includes a piezoelectric element. The piezoelectric element includes an upper electrode and a lower electrode. The lower electrode has a partial overlapping portion and a non-overlapping portion. The partial overlapping portion at least partially overlaps the pressure chamber. The partial overlapping portion of the lower electrode has two ends in the transverse direction. The upper electrode has two ends in the transverse direction. A distance from the center of the pressure chamber in the transverse direction to one of the two ends of the upper electrode in the transverse direction is smaller than a distance from the center of the pressure chamber in the transverse direction to a corresponding one of the two ends of the partial overlapping portion in the transverse direction.

主权项

1. A liquid ejection apparatus, comprising:
a pressure chamber having a longitudinal direction; a first insulating film covering the pressure chamber; a piezoelectric element corresponding to the pressure chamber and including a lower electrode disposed above the first insulating film, a piezoelectric film disposed above the lower electrode, and an upper electrode disposed above the piezoelectric film; a common trace connecting to the upper electrode and another upper electrode, the upper electrode and the another upper electrode are disposed side by side in a transverse direction, the transverse direction is orthogonal to the longitudinal direction; and wherein the lower electrode has a partial overlapping portion and a non-overlapping portion; the partial overlapping portion at least partially overlaps the pressure chamber in an orthogonal direction, the orthogonal direction is orthogonal to the longitudinal direction and the transverse direction; the partial overlapping portion of the lower electrode has two ends in the transverse direction; the upper electrode has two ends in the transverse direction; and a distance from the center of the pressure chamber in the transverse direction to one of the two ends of the upper electrode in the transverse direction is smaller than a distance from the center of the pressure chamber in the transverse direction to a corresponding one of the two ends of the partial overlapping portion in the transverse direction.