发明名称 Liquid MEMS capacitor
摘要 A liquid micro-electro-mechanical system (MEMS) capacitor includes a first capacitor plate, a second capacitor plate, a channel, a dielectric doped droplet, and a droplet activating module. The channel is implemented or embedded in one or more layers of a board and the dielectric doped droplet is contained in the channel. The droplet activating module operable to change the dielectric doped droplet with respect to the first and second capacitive plates, which are proximal to the channel and at a distance from each other, thereby changing a dielectric property of the liquid MEMS capacitor.
申请公布号 EP2706545(B1) 申请公布日期 2017.03.29
申请号 EP20130004224 申请日期 2013.08.27
申请人 Broadcom Corporation 发明人 Rofougaran, Ahmadreza
分类号 H01G5/16;H01G5/013;H01G5/019;H01G7/00;H01H59/00;H04B1/00 主分类号 H01G5/16
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