Optical scanning device and laser machining device having pluralities of flat reflective surfaces corresponding to divided virtual arcs

摘要

An optical scanning device includes: a light projector configured to radiate light while causing the light to make angular movement at a constant speed; and a light reflector configured to reflect the light radiated from the light projector to guide the light to an intended irradiated point on a predetermined scanning line. The light reflector includes a plurality of reflecting portions and reflects, at least twice, the light radiated from the light projector to guide the light to the intended irradiated point. The reflecting portions each include a plurality of reflecting surfaces. A length of an optical path from the light projector to the irradiated point is substantially constant for all of irradiated points on the scanning line, and a scanning speed, on the scanning line, of the light radiated from the light projector is substantially constant.

主权项

1. A laser machining device configured to form a machining line with a laser beam in a thin-film layer formed on work, the laser machining device comprising:
an optical scanning device configured to scan light as the laser beam along a predetermined scanning line on the work, the optical scanning device comprising:
a light projector configured to radiate light while causing the light to make angular movement at a constant speed; anda light reflector configured to reflect the light radiated from the light projector to guide the light to an intended irradiated point on the predetermined scanning line, whereinthe light reflector includes a plurality of reflecting portions and reflects, at least twice, the light radiated from the light projector to guide the light to the intended irradiated point, each of the reflecting portions including a plurality of reflecting surfaces that are flat surfaces,the plurality of reflecting portions reflect the light radiated from the light projector at least twice such that a plurality of virtual chords respectively corresponding to a plurality of divided virtual arcs, which are obtained by dividing a virtual arc in a circumferential direction, are rearranged such that the plurality of virtual chords are sequentially continuous and linearly aligned to form the scanning line,the virtual arc is an arc drawn by a focal point of the light radiated from the light projector when it is assumed that the light reflector is absent, the arc having a center coinciding with a center of the angular movement, the plurality of reflecting surfaces of each reflecting portion correspond to the plurality of divided virtual arcs, respectively, and a length of an optical path from the light projector to the irradiated point is substantially constant for all of irradiated points on the scanning line, and a scanning speed, on the scanning line, of the light radiated from the light projector is substantially constant.