Microphone

摘要

A microphone comprises a sound inlet, a first MEMS microphone structure comprising a first membrane and associated backplate in the path of the sound inlet and a second MEMS microphone structure comprising a second membrane and associated backplate stacked with respect to the first microphone membrane, with an enclosed space between the first and second membranes.

主权项

1. A microphone comprising:
a sound inlet; a first microphone structure comprising a first membrane and a first backplate in a path of the sound inlet; a second microphone structure comprising a second membrane stacked with respect to the first microphone structure, with an enclosed space between the first and second membranes, wherein the first and second microphone structures are back to back, such that movement of one of the first membrane towards the first backplate is accompanied by movement of the second membrane away from the first backplate; and a signal processor configured to combine microphone signals of the first and second microphone structures to generate a microphone output; wherein the signal processor is configured to combine the microphone signals of the first and second microphone structures to detect at least one of:
a non-linear microphone signal response of one of the first and second microphone structures; andpull-in of the membranes of one or both of the first and second microphone structures.