| 发明名称 |
MANIPULATOR |
| 摘要 |
The present disclosure provides a manipulator mounted between a first chamber and a second chamber of a vacuum reaction apparatus for moving a plate material from the first chamber to the second chamber. The manipulator comprises: a first supporting structure on which a rail is provided along a first direction in a horizontal plane, wherein the first chamber and the second chamber are respectively positioned at two opposite ends of the rail; an arm mounted on the first mounting structure for bearing the plate material, wherein the arm is movable along the rail; and a vertically mechanism on which the first supporting structure and the arm are mounted, wherein the vertically mechanism is capable of driving the first supporting structure and the arm to move in a vertical direction. |
| 申请公布号 |
US2017084472(A1) |
申请公布日期 |
2017.03.23 |
| 申请号 |
US201615147637 |
申请日期 |
2016.05.05 |
| 申请人 |
BOE TECHNOLOGY GROUP CO., LTD. ;HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD. |
发明人 |
LI Jinkun;GUO Guoming;GU Nanxuan;HOU Jian;LIU Shuyu;LIU Min;HAO Xikui |
| 分类号 |
H01L21/67;H01L21/677;B25J15/00 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A manipulator mounted between a first chamber and a second chamber of a vacuum reaction apparatus for moving a plate material from the first chamber to the second chamber, wherein the manipulator comprises:
a first supporting structure on which a rail is provided along a first direction in a horizontal plane, wherein the first chamber and the second chamber are respectively positioned at two opposite ends of the rail; an arm mounted on the first supporting structure for bearing the plate material, wherein the arm is movable along the rail; and a vertically movable mechanism on which the first supporting structure and the arm are mounted, wherein the vertically movable mechanism is capable of driving the first supporting structure and the arm to move in a vertical direction. |
| 地址 |
Beijing CN |
