发明名称 走査器システムを用いた連続走査軌道に沿う走査方法
摘要 The invention relates to a method for scanning along a continuous scanning trajectory with a scanner system (100) comprising a first pair of acousto-optic deflectors (10) for deflecting a focal spot of an electromagnetic beam generated by a consecutive lens system (200) defining an optical axis (z) in an x-z plane, and a second pair of acousto-optic deflectors (20) for deflecting the focal spot in a y-z plane being substantially perpendicular to the x-z plane, characterised by changing the acoustic frequency sweeps with time continuously in the deflectors (12, 12′) of the first pair of deflectors (10) and in the deflectors (22, 22′) of the second pair of deflectors (20) so as to cause the focal spot to move continuously along the scanning trajectory.
申请公布号 JP6101286(B2) 申请公布日期 2017.03.22
申请号 JP20140550762 申请日期 2012.01.05
申请人 フェムトニクス ケイエフティー.FEMTONICS KFT. 发明人 ローザ、バラス;カトーナ、ゲルゲリー;ベレス、マテ;マーク、パル;スザライ、ゲルゲリー;カザス、アティラ;チオビニ、バラス;マタス、ペーター
分类号 G02F1/33 主分类号 G02F1/33
代理机构 代理人
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